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Tuning of microstructure and piezoelectric response of laser ablated Pb(Zr,Ti)O3 films by varying the oxygen deposition pressure


Minh D. Nguyen

Source title: 
Ferroelectrics, 573(1), 2021 (ISI)
Academic year of acceptance: 

We report on the correlated investigation between piezoelectric properties and crystalline structure of PbZr0.52Ti0.48O3 (PZT) films under different oxygen pressures in the process of pulsed laser deposition. A sharp increase of effective longitudinal-piezoelectric coefficient (305 pm/V) and especially, a high effective transverse-piezoelectric coefficient (−16.2 C/cm2) were achieved in the PZT film deposited at 0.10 mbar, where the preferred (100)-orientation and columnar-grains with an obelisk-shape microstructure were presented. The comparative discussions in this study provide valuable insights into the crystalline and microstructure contributions to improve the piezoelectric responses for wide applications in high-performance piezoelectric devices from capacitors to MEMS devices.