Tuning of microstructure and piezoelectric response of laser ablated Pb(Zr,Ti)O3 films by varying the oxygen deposition pressure
Tuning of microstructure and piezoelectric response of laser ablated Pb(Zr,Ti)O3 films by varying the oxygen deposition pressure
We report on the correlated investigation between piezoelectric properties and crystalline structure of PbZr0.52Ti0.48O3 (PZT) films under different oxygen pressures in the process of pulsed laser deposition. A sharp increase of effective longitudinal-piezoelectric coefficient (305 pm/V) and especially, a high effective transverse-piezoelectric coefficient (−16.2 C/cm2) were achieved in the PZT film deposited at 0.10 mbar, where the preferred (100)-orientation and columnar-grains with an obelisk-shape microstructure were presented. The comparative discussions in this study provide valuable insights into the crystalline and microstructure contributions to improve the piezoelectric responses for wide applications in high-performance piezoelectric devices from capacitors to MEMS devices.